SEM EDS with ChemiSEM Technology

SEM with energy dispersive X-ray spectroscopy for materials characterization.


What is energy dispersive X-ray spectroscopy?

Energy dispersive X-ray spectroscopy (EDS, or EDX) is a powerful analytical technique for characterizing chemical composition on the macro-, micro- and nanoscale. EDS derives compositional information from X-rays emitted when the electron beam scans over a sample, with each element identified from its characteristic X-ray line profile.  EDS is used to analyze almost the entire periodic table, providing information on the distribution of the elements present.  Information provided by EDS supports in-depth material characterization for a wide range of industrial and academic applications, spanning process/quality control to failure analysis and fundamental research. 

What is energy dispersive X-ray spectroscopy SEM and ChemiSEM image of ceramic in glass showing the localization of the zirconium. The ChemiSEM image highlights the presence of aluminum in the area of interest, otherwise not visible with the SEM only.

How ChemiSEM Technology enables EDS analysis

Thermo Scientific ChemiSEM Technology offers a leap forward in usability, convenience, and speed of analysis. It integrates advanced elemental analysis with the electron image in real time. Within one software interface, the operator can:

  • View the sample image from any electron detector.
  • See areas of different chemical composition on the sample surface.
  • Viewpoint and area compositional analyses with a single click.
  • Chart compositional changes across the sample.
  • Create maps of elemental or phase distribution across the sample.

 

ChemiSEM Technology simplifies EDS analysis by fully integrating SEM and EDS functions into a single, cohesive user interface. Based on live quantification and building on decades of expertise in EDS analysis, the technology provides elemental information quickly and easily, helping to ensure reliable results. And because ChemiSEM Technology is always on, it can dramatically shorten time to results, highlight features that would have previously gone unnoticed, and provide more complete information.

How ChemiSEM Technology enables EDS analysis ChemiSEM makes all the needed information available in one time, allowing users to speed up their work with more complete data.

Benefits of SEM EDS analysis with ChemiSEM Technology

  • Always on—Eliminate the need to move from SEM imaging to EDS analysis for each sample. ChemiSEM Technology is always on and continuously collects the EDS signal during SEM imaging, collecting a full EDS spectrum at every point in the image.
  • Faster data acquisition—Access elemental information much faster than conventional techniques with novel data segmentation approaches based on machine learning, ultrafast signal processing, and the tightest possible SEM EDS integration.
  • Reliable results—Get accurate qualification and quantification over the widest range of operating conditions including beam energy, sample size, and working distance.
  • Complete information—See the big picture with comprehensive micro-scale elemental composition. Immediate color results reveal defects or imperfections you might have otherwise missed.
  • Multi-data viewing—See SEM and elemental information in a single frame for complete characterization of your sample at a glance.
  • Simplified operation—Immediately view compositional results that make elemental information accessible to everyone and easily increase the number of scientists or engineers who can use your facilities.

ChemiSEM Technology is designed and built to provide full control over all SEM and EDS functions within a single user interface. Experiment setup, image processing, and spectral analysis functions are intuitively grouped, making data management straightforward. And the system features a quadrant format and project tree to highlight the most important data.


ChemiPhase analysis: Identify unique phases using advanced statistical analysis

ChemiPhase is a new ChemiSEM Technology feature that allows to run phase analysis on areas of interest by using a big data approach to detect all statistically significant spectra within the datacube. Characterizing the presence of different phases in complex materials is now much more straightforward and intuitive. ChemiPhase is a comprehensive, unbiased statistical engine. Compared to traditional methods that are highly dependent on assumptions about the samples, ChemiPhase avoids erroneous results if unexpected elements are missed due to overlapping peaks or insufficient intensities.

Benefits of ChemiPhase analysis

  • No user bias; fully automated process with no prior identification of elements.
  • Complete and comprehensive analysis; major and minor components identification down to a single pixel with no peak overlaps.
  • Fast and reliable; phase determination with very little X-ray data (as few as 10 counts per pixel) and results provided in less than a minute, even for complex phase maps.
  • Reduced complexity; image and spectrum view pair for each distinct phase. Automatic optimization of all spectra for a more confident analysis.

Meet the scientists using ChemiSEM Technology

ChemiSEM Testimonial - Carlos Angeles Chavez
Carlos Angeles Chavez from the Mexican Petroleum Institute comments on his first impressions of his live demo with the Thermo Scientific Prisma E SEM with ChemiSEM technology.
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          Up NextChemiSEM Testimonial - Carlos Angeles Chavez

          Carlos Angeles Chavez from the Mexican Petroleum Institute comments on his first impressions of his live demo with the Thermo Scientific Prisma E SEM with ChemiSEM technology.

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          Lifeng Dong from Hamline University comments on his first impressions of his live demo with the Thermo Scientific™ Prisma E SEM with ChemiSEM technology.

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          Cedric Barroo from the Universite Libre de Bruxelles comments on his first impressions of his live demo with the Thermo Scientific Prisma E SEM with ChemiSEM technology.

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      ChemiSEM Technology applications

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          For Research Use Only. Not for use in diagnostic procedures.