EBSD integrated with EDS analysis in a scanning electron microscope

In the fast-paced environment of modern industry, the ability to perform comprehensive material characterization quickly and accurately is crucial. Industries seek solutions that provide complete analysis without the need for multiple tools. Consequently, the technological development of scanning electron microscopes (SEMs) is now geared toward more integrated solutions. These solutions not only offer superior imaging performance but also meet market demands by seamlessly incorporating advanced analytical capabilities like energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD).

Elements

Benefits of EBSD and EDS

The combination of EDS and EBSD offers a powerful and comprehensive analytical capability that is highly valued in industry. Integrating these two techniques provides a unique approach to material characterization, combining crystallographic information with chemical composition analysis. This integrated method offers numerous benefits, with the primary advantage being the ability to perform complete analysis on the same area of interest. By correlating microstructural features with their chemical compositions, researchers can understand how composition affects material properties and behavior.

EBSD and EDS combination
SEM,EDS,EBSDWorkflow

The ease of obtaining both EDS and EBSD data from the same area with minimal parameter and setting changes allows to set up workflows rather than disjointed analyses, enhancing repeatability and accuracy of the results. Researchers can collect all necessary data in a single session, significantly reducing the time and effort compared to using separate instruments or techniques. These enhanced and accessible workflows provide better visualization and understanding of materials, with color-coded maps showing both elemental distribution and crystallographic orientation for a more intuitive understanding of material characteristics.

 

The Thermo Scientific Apreo ChemiSEM System exemplifies this advanced integration, offering advanced imaging performance across a wide range of materials and conditions. By integrating EDS and EBSD, the Apreo ChemiSEM System greatly enhances the ability to comprehensively characterize materials. This integration supports better understanding and control of material properties, supporting quality assurance, improving failure analysis, and helping to optimize processes and material development.


Electron backscatter diffraction articles

How does EBSD work?

The Importance of EBSD in Industrial and Research Applications

What is energy-dispersive X-ray spectroscopy (EDS)?

For Research Use Only. Not for use in diagnostic procedures.