Applications
Hexamethyldisilazane is used as a solvent in organic synthesis and organometallic chemistry. It is often used as an adhesion promoter for photoresist in photolithography. Further, it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.

Solubility
Miscible with methanol, chloroform, ethyl ether and benzene. Immiscible with water.                    

Notes
Incompatible with strong oxidizing agents and strong acids.