Silicon dioxide thin films prepared by chemical vapor deposition from tetrakis (dimethylamino) silane and ozone. Aminosilanes mere prepared by methods all essentially similar, and only the 15olation of tetrakis-(dimethylamino)-silane.
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Applications
Silicon dioxide thin films prepared by chemical vapor deposition from tetrakis (dimethylamino) silane and ozone. Aminosilanes mere prepared by methods all essentially similar, and only the 15olation of tetrakis-(dimethylamino)-silane.
Solubility
Reacts with water.
Notes
Moisture Sensitive. Store in cool place. Keep container tightly closed in a dry and well-ventilated place. Store away from strong oxidizing agents, water, moisture.
RUO – Research Use Only
General References:
- Toshiro Maruyama,; Toshimasa Shirai. Silicon dioxide thin films prepared by chemical vapor deposition from tetrakis (dimethylamino)silane and ozone. Appl. Phys. Lett. 1993, 63(5),611.
- Y. W. Bae,; W. Y. Lee,; T. M. Besmann,; P. J. Blau.Nanoscale hardness and microfriction of titanium nitride films deposited from the reaction of tetrakis (dimethylamino) titanium with ammonia. Appl. Phys. Lett. 1995 , 66(15) , 1895.