Helios Hydra PFIB-SEM

Helios Hydra PFIB-SEM overview

The Thermo Scientific Helios Hydra PFIB-SEMs are versatile multi-application tools with four different ion species (argon, nitrogen, oxygen, and xenon), allowing you to choose the ions that provide the best results. Great results start with comprehensive sample preparation, whether you are performing S/TEM lamella imaging, 3D characterization, or large area physical failure analysis.

 

Now with enhanced, targeted applications capability, the Helios 5+ Hydra is here. Learn more about what this innovative system can do for your failure analysis and materials characterization challenges.

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Revolutionizing Semiconductor Failure Analysis: Introducing the Thermo Scientific Helios Hydra 5+ and Helios 5+ Plasma FIBs

Discover the Helios Hydra 5+ and Helios 5+ Plasma FIBs. Next-gen tools for failure analysis, TEM sample prep, device delayering, and large-volume analysis. Delivering unmatched precision, low-energy inspection, and advanced automation.

Instrument features of the Helios Hydra PFIB-SEM

Multiple plasma FIB ion species

You can switch easily between argon, nitrogen, oxygen, and xenon in under ten minutes without sacrificing performance. This remarkable flexibility significantly expands the potential application space of PFIB and helps enable research of ion–sample interactions to optimize existing use cases.

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Ultra-high-resolution SEM analysis

Combines the innovative multi-ion species plasma-FIB column with the monochromated Thermo Scientific Elstar UC+ SEM Column to provide advanced focused ion- and electron-beam performance.

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Precision FIB milling control

Provides precise control of your milling processes and experiments with optimized beam profiles, even at maximum currents, with timesaving, intuitive software for manual and guided workflow applications.

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Exclusive features of the Helios Hydra 5+ PFIB-SEM

Extreme plasma FIB milling

Significant enhancements for large-volume applications can be achieved easily with automated alignments for all PFIB apertures, allowing 50% higher in max currents to always be accessible and optimized, up to 6µA.

Large volume plasma FIB milling.

Advanced TEM sample preparation

Our new generation of Thermo Scientific AutoTEM Software features automated alignments to ensure consistent, high-quality data, achieving robustness for grid attach and precise thinning of samples for detailed analysis of small features and minimized thinning time.

TEM sample preparation with FIB milling.

Damage-free delayering

Designed to revolutionize defect analysis by helping to ensure damage-free acquisition. Enhanced robustness during delayering automation allows for continuous 48-hour operation. 100 eV imaging significantly improves reliable characterization of devices by preserving their true state with ultra-low energy inspection.

SEM defect analysis with FIB delayering.

The next level in comprehensive sample preparation technology

Watch the live launch of the Thermo Scientific Helios 5+ PFIB-SEMs

For Research Use Only. Not for use in diagnostic procedures.