uPolisher

The Thermo Scientific™ μPolisher system is a unique solution for in situ, very low energy, local surface modification, including polishing and cleaning of bulk samples. The system uses static beam of gaseous Ar+ ions with adjustable energies and a wide range of ion currents to ensure gentle surface polishing on a large variety of applications.

Key Benefits​

• Unique solution with potential to enable large number of novel, unexplored applications
• Very low energy milling with a static ion beam (20 - 500eV) for the most gentle surface polishing​
• In situ SEM/DualBeam solution, allowing for experimentation after cleaning without the need to break the vacuum​
• Small spot size for precise local surface treatment without re-deposition​
• Wide range of operating conditions, for large variety of applications
• Fully integrated in the microscope user interface, providing easy and intuitive operation

Potential applications​

• Low damage milling
• ​Removal of oxidation layer​
• Cleaning of surface from hydrocarbons
• Removal of Ga contamination
• Reduction of damage layer after FIB processing