Advanced logic and memory manufacturing processes are becoming more reliant on fast turnaround of precise structural and analytical data to be able to quickly calibrate tool sets, diagnose yield excursions, and optimize process yields. At technology nodes below 28nm, especially in cases where non-planar device designs are being implemented, conventional SEM or optical-based analysis and inspection tools cannot provide useful data. The Thermo Scientific™ Metrios™ transmission electron microscope (TEM) is the first TEM dedicated to providing the fast, precise measurements that semiconductor manufacturers need to develop and control their wafer fabrication processes.