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Materials characterization

Advanced materials characterization labs require access to the latest techniques and will push analytical tools, including SEMs, to the extremes of their capabilities. Most of these labs are multi-user facilities that accommodate users with varying degrees of experience. Time on the microscope is precious, and excessive time spent on maintenance, alignments, training, or image optimization needs to be avoided.

Apreo 2 Scanning Electron Microscope

The new Thermo Scientific Apreo 2 SEM expands access to high-performance imaging and analytics to all levels of microscopy expertise. With Thermo Scientific ChemiSEM Technology, a unique live elemental imaging capability, compositional information is always available, through the most intuitive interface. Eliminating all the hassle associated with typical EDS implementations, ChemiSEM Technology offers unprecedented time to result and ease of use.

The Apreo 2 SEM poses much smaller demands on users and lab managers with Thermo Scientific SmartAlign Technology, an optics system that aligns itself. Furthermore, the Apreo 2 SEM automates the image fine-tuning process with Thermo Scientific FLASH technology. FLASH Technology executes any necessary corrections to lens centering, the stigmators, and final focus of the image. The combination of these technologies means that users new to electron microscopy can access the high-end performance of the Apreo 2 SEM. Additionally, the Apreo 2 SEM is the only SEM with a 1-nanometer resolution at 10 mm analytical working distance. No longer does long working distance mean poor imaging. With the Apreo 2 SEM, anyone will be able to confidently get great results.

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    Apreo 2 SEM video teaser

    Apreo 2 Scanning Electron Microscope features

    High performance, resolution, and contrast

    The combination of advanced optics, detection and automation in Apreo 2 makes obtaining high resolution imaging possible even for users new to SEM.

    Lithium Ion cathode

    Wide range of sample types

    Apreo 2 was designed for maximum flexibility. High quality, high resolution imaging is possible regardless of target samples properties. Insulators, beam sensitive or magnetic materials can all be imaged with ease thanks to Apreo 2's unique optics, detection and beam control options.

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      Live quantitative EDS with ChemiSEM

      Elemental information at your fingertips with ChemiSEM, which provides live quantitative elemental mapping for unprecedented time to result and ease of use.

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        Quick and easy sample loading

        Easy access to the stage, a convenient multi-sample holder, and a fast pump down ensures no time is wasted loading samples. An automated routine to insert and remove a pressure limiting aperture (PLA) allows for a seamless switch between high and low vacuum without opening the chamber.

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            Advanced automation

            From optics, to image acquisition, Apreo 2 provides a range of automated features to make imaging time as effective and efficient as possible. Flash Technology automates image fine tuning The unique Undo function permits efficient exploration of imaging conditions Thermo Scientific Maps software automates large area acquisition with up to 4 different simultaneous signals

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                Performance at long working distance

                Apreo 2 is the only SEM that offers high-resolution performance (1nm) and excellent image quality at analytical working distance (10mm). Sample morphology, topography and surface information can all be simultaneously explored while being at a safe distance from the pole piece. Thanks to its high-speed and high-sensitivity in-lens backscattered detector, BSE are still detected even at extremely low beam currents (as low as few pA).

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                  Apreo 2 Scanning Electron Microscope specifications

                  Style Sheet for Products Table Specifications
                   

                  Apreo 2 S

                  Apreo 2 C

                  Resolution

                  • 0.9 nm at 1 kV
                  • 0.8 nm at 1 kV (beam decel.)
                  • 1.0 nm at 1 kV, 10 mm working distance (beam decel.)
                  • 0.8 nm at 500 V (beam decel.)
                  • 1.2 nm at 200 V (beam decel.)
                  • 1.2 nm at 1 kV
                  • 1.0 nm at 1 kV (beam decel.)
                  • 1.2 nm at 500 V (beam decel.)

                  Standard detectors

                  • ETD, T1, T2, T3, IR-CCD, Nav-Cam+
                  • ETD, T1, T2, IR-CCD, Nav-Cam+

                  PivotBeam

                  • Mode for selected area electron channeling (also known as "rocking beam" mode).
                  • Not applicable

                  Optional detectors

                  • DBS, LVD, DBS-GAD, STEM 3+, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.

                  ChemiSEM Technology (optional)

                  • Live quantitative SEM image coloring is available based on energy dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps, and reliable Noran quantification are included.

                  Landing energy range

                  • 20 eV – 30 keV

                  Stage bias (beam deceleration)

                  • -4000 V to +600 V standard with every system

                  Low vacuum mode

                  • Optional: 10 – 500 Pa chamber pressure

                  Stage

                  • 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

                  Maximum beam current

                  • 50 nA (400 nA configuration also available)

                  Standard sample holder

                  • Multi-purpose holder, uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples and two pre-tilted row-bar holders (38° and 90°) and does not require tools to mount a sample

                  Chamber

                  • 340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage
                  Style Sheet to change H2 style to p with em-h2-header class
                  Style Sheet for Komodo Tabs

                  Resources

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                    Long working distance imaging on palladium nanoparticles on cerium oxide matrix.

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                      Easy nanoparticles imaging at 10 mm working distance.

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                        Highlight contrast that would otherwise go unnoticed

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                          High material contrast and easy platinum nanoparticles imaging at 10 mm working.

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                            This video demonstrates how Apreo's Trinity detection system quickly answers all our questions about a sample. 

                            On-demand webinar: Introduction to Apreo 2 - Unmatched versatility powered by ChemiSEM Technology

                            This is an introduction on-demand webinar to be followed by a more extensive overview of the Apreo 2 SEM, its features, functionalities, ChemiSEM technology, and a demonstration of the Apreo 2 in action. Attend this on-demand webinar to:

                            • Learn about the latest in analytical UHR-SEM from Thermo Fisher Scientific.
                            • Get introduced to the Apreo 2 SEM.

                            Webinar: Scanning electron microscopy: selecting the right technology for your needs

                            This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

                            • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
                            • How samples are characterized in their natural state without the need for sample preparation.
                            • How new advanced automation allows researchers to save time and increase productivity.
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                              Long working distance imaging on palladium nanoparticles on cerium oxide matrix.

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                                Easy nanoparticles imaging at 10 mm working distance.

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                                  Highlight contrast that would otherwise go unnoticed

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                                    High material contrast and easy platinum nanoparticles imaging at 10 mm working.

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                                      This video demonstrates how Apreo's Trinity detection system quickly answers all our questions about a sample. 

                                      On-demand webinar: Introduction to Apreo 2 - Unmatched versatility powered by ChemiSEM Technology

                                      This is an introduction on-demand webinar to be followed by a more extensive overview of the Apreo 2 SEM, its features, functionalities, ChemiSEM technology, and a demonstration of the Apreo 2 in action. Attend this on-demand webinar to:

                                      • Learn about the latest in analytical UHR-SEM from Thermo Fisher Scientific.
                                      • Get introduced to the Apreo 2 SEM.

                                      Webinar: Scanning electron microscopy: selecting the right technology for your needs

                                      This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

                                      • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
                                      • How samples are characterized in their natural state without the need for sample preparation.
                                      • How new advanced automation allows researchers to save time and increase productivity.

                                      Applications

                                      Fundamental Materials Research_R&D_Thumb_274x180_144DPI

                                      Fundamental Materials Research

                                      Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

                                       

                                      Quality control and failure analysis using electron microscopy

                                      Quality control and failure analysis

                                      Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

                                      Semiconductor-RD_1920x1080

                                      Semiconductor research and development

                                      Innovation starts with research and development. Learn more about solutions to help you understand innovative structures and materials at the atomic level.

                                      Semi-Metrology_1920x1080

                                      Semiconductor metrology

                                      Manufacturing today’s complex semiconductors requires exact process controls. Learn more about advanced metrology and analysis solutions to accelerate yield learnings.

                                      Semiconductor Failure Analysis

                                      Semiconductor Failure Analysis

                                      Complex semiconductor device structures result in more places for defects to hide. Learn more about failure analysis solutions to isolate, analyze, and repair defects.

                                      Semi-Materials-Character_1920x1080

                                      Semiconductor materials characterization

                                      Many factors impact yield, performance, and reliability. Learn more about solutions to characterize physical, structural, and chemical properties.

                                      Display Module Failure Analysis

                                      Semiconductor display technology

                                      Display technologies are evolving to improve display quality and light conversion efficiency. Learn how metrology, failure analysis, and characterization solutions provide insights.


                                      Techniques

                                      EDS Analysis with ChemiSEM Technology

                                      Energy dispersive X-ray spectroscopy for materials characterization.

                                      Learn more ›

                                      Energy Dispersive Spectroscopy

                                      Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

                                      Learn more ›

                                      Imaging Hot Samples

                                      Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

                                      Learn more ›

                                      Cathodoluminescence

                                      Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

                                      Learn more ›

                                      Multi-scale analysis

                                      Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

                                      Learn more ›

                                      Semiconductor Analysis and Imaging

                                      Thermo Fisher Scientific offers scanning electron microscopes for every function of a semiconductor lab, from general imaging tasks to advanced failure analysis techniques requiring precise voltage-contrast measurements.

                                      Learn more ›

                                      EDS Analysis with ChemiSEM Technology

                                      Energy dispersive X-ray spectroscopy for materials characterization.

                                      Learn more ›

                                      Energy Dispersive Spectroscopy

                                      Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

                                      Learn more ›

                                      Imaging Hot Samples

                                      Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

                                      Learn more ›

                                      Cathodoluminescence

                                      Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

                                      Learn more ›

                                      Multi-scale analysis

                                      Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

                                      Learn more ›

                                      Semiconductor Analysis and Imaging

                                      Thermo Fisher Scientific offers scanning electron microscopes for every function of a semiconductor lab, from general imaging tasks to advanced failure analysis techniques requiring precise voltage-contrast measurements.

                                      Learn more ›


                                      Contact us

                                      Electron microscopy services

                                      To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

                                      Learn more ›

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