Innovative TEM metrology solution on blanket films

Accurate measurements of blanket films for semiconductor applications in advanced logic and memory manufacturing depend heavily on transmission electron microscopy (TEM) metrology, which serves as the benchmark reference data. The main challenge in achieving fully automated TEM metrology on blanket films lies in the absence of distinguishable structures visible in the cross sections of these films, hindering optimized image acquisition.

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Thermo Fisher Scientific has introduced an innovative solution to this challenge by implementing a Smart Automation workflow and utilizing a “notch” type fiducial created by focused ion beam (FIB) milling. This method enables fully automated TEM metrology on blanket films, overcoming the limitations posed by the lack of distinguishable structures.

Download our application note, Fully Automated Blanket Film Imaging with Metrios Smart Automation, to learn how Smart Automation on the Thermo Scientific Metrios (S)TEM offers a cutting-edge solution for measuring blanket films with exceptional accuracy, precision, and repeatability. Discover the ways in which this innovative technology provides seamless full automation, ensuring reliable and consistent results.

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