Vulcan Automated Lab

Scaling semiconductor lab productivity

Semiconductor technology is progressing at an extraordinary pace, and the demand for atomic-scale transmission electron microscopy (TEM) data has reached new heights. The challenge of quickly scaling laboratory operations while maintaining high efficiency and productivity has become more urgent than ever. We have the answer.

Automated solution for scaling TEM metrology in the semiconductor lab

The Thermo Scientific Vulcan Automated Lab is our complete, scalable semiconductor lab automation solution that is set to open a new era in atomic-scale data acquisition. This seamlessly connected, AI-powered TEM metrology workflow is the first of its kind, bridging the time to data gap between the lab and the fab. Through innovative advancements on tool automation, materials handling automation, and continuous data connectivity, the connected TEM metrology workflow delivers high-volume data of exceptional quality and improved productivity by reducing operator burden.

Vulcan Automated Lab workflow

Automated TEM metrology is just the start of a whole new era in lab productivity.

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Scaling TEM metrology lab output with the Vulcan Automated Lab

Watch the video to witness our revolutionary TEM metrology workflow!
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Interview with Abhi Barve, Sr Director of Automated Solutions

Learn from Abhi Barve how the Vulcan Automated Lab addresses the challenges of scaling lab operations to meet the increasing demand for TEM metrology data.

Vulcan Automated Lab instruments for TEM metrology

We recognize the significance of maximum lab productivity. Leveraging our expertise and advanced tools, we provide customized solutions to address the distinct challenges encountered in scaling lab operations. Enabling lab automation requires innovations in TEM sample preparation, TEM metrology, and integration with automated materials handling systems (AMHS) and manufacturing execution systems (MES). Explore our Vulcan Automated Lab instruments below to learn more.

Helios 6 HXS FIB-SEM

Through several advancements, the Thermo Scientific Helios 6 HXS FIB-SEM provides top-tier automation and accuracy for high-volume semiconductor TEM sample preparation. It features automated navigation, precise positioning for TEM sample preparation, site setup, and automated thinning enhanced by machine learning-assisted endpoints. Additionally, it includes AI training capability for fine-tuning and refining automation models to specific device types.

The Helios 6 HXS FIB-SEM is designed for automated lab integration and includes hardware and software interfaces to automate materials handling systems (AMHS) and manufacturing execution systems (MES).

Thermo Scientific Helios 6 HXS FIB-SEM

Metrios 6S (S)TEM

The Thermo Scientific Metrios 6S Scanning Transmission Electron Microscope ((S)TEM) is specifically designed for semiconductor critical dimension (CD) reference metrology and characterization. This data enables you to accelerate yield ramp with exceptional productivity.

To enable scalable operation, this instrument facilitates data management in a fully automated workflow and has interfaces to connect to automated materials handling systems (AMHS) and manufacturing execution systems (MES). This significantly reduces the operator burden, which has limited high-productivity results in the past.            

Thermo Scientific Metrios 6S (S)TEM

Stay connected with us to learn more how you can scale your operations with the latest advancements in fab-like lab automation solutions.
 

For Research Use Only. Not for use in diagnostic procedures.