The Thermo Scientific™ Helios 5 Hydra UX DualBeam is part of the fifth generation of the industry-leading Helios DualBeam family. It combines the new, innovative multiple ion species PFIB column with the monochromated Thermo Scientific Elstar SEM Column to provide the most advanced focused ion- and electron-beam performance.
Largest application space with unique ion source delivering four fast, switchable ion species: Xe, Ar, O, N
Highest quality Ga+ free TEM and APT sample preparation with Xe, O or Ar thanks to the new PFIB column enabling 500 V final polishing and delivering superior performance at all operating conditions
Fastest and easiest, automated, multisite in situ and ex situ TEM sample preparation and cross-sectioning using optional AutoTEM 5 Software
Highest throughput and quality statistically relevant 3D characterization, cross-sectioning and micromachining using next-generation 2.5 μA Plasma FIB column
Access high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software
Shortest time to nanoscale information for users with any experience level with SmartAlign and FLASH technologies
Reveal the finest details using the best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies
The most complete sample information with sharp, refined and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors
Most advanced capabilities for electron and ion beaminduced deposition and etching on DualBeam systems with optional MultiChem or GIS Gas Delivery Systems
Precise sample navigation tailored to individual application needs thanks to the high stability and accuracy of the 150 mm Piezo stage and optional in-chamber Nav-Cam Camera
Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan and DCFI Modes