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Energy dispersive X-ray spectroscopy techniques for elemental analysis of materials
Energy dispersive X-ray spectroscopy (EDS) techniques have revolutionized the field of materials analysis by providing comprehensive elemental data with high precision and speed. Among these techniques, SEM EDS stands out for its integration of SEM and EDS functions into a single, user-friendly interface, offering live quantification and reducing analysis time significantly. Additionally, the Thermo Scientific desktop SEM EDS systems enhance usability through automation and reliable quantitative data, making complex analyses more accessible. Furthermore, 3D EDS tomography enables nanoscale analysis in three dimensions, providing detailed compositional data and visualizing chemical maps for a thorough understanding of material structures. These advancements in energy dispersive X-ray spectroscopy technology are essential for modern materials research, offering unparalleled insights and efficiency.
SEM EDS with ChemiSEM Technology
Thermo Scientific ChemiSEM Technology offers a leap forward in usability, convenience, and speed of analysis by seamlessly integrating state-of-the-art elemental analysis with real-time electron imaging.
This advanced technology streamlines EDS analysis by merging SEM and EDS functions into a unified user interface. It leverages live quantification and decades of EDS analysis expertise to deliver rapid and reliable elemental information. And because ChemiSEM Technology is always on, it can significantly reduce time to results, highlight previously overlooked features, and provide more comprehensive data.
Atomic-resolution elemental mapping with TEM EDS
High-resolution energy dispersive X-ray spectroscopy for elemental mapping and characterization at the atomic scale
The combination of atom-sized electron probes with high current and sensitive X-ray detectors now enables routine atomic-resolution spectroscopy in electron microscopes. Energy-dispersive X-ray spectroscopy (EDS or EDX) can differentiate a wide range of elements based on their distinctive X-ray signals, making it well-suited for individual atom identification. This capability allows researchers to characterize and manipulate materials at the atomic level, offering exceptional insights into nanomaterial and particle behavior.
As demonstrated in the examples of yttrium titanate on this page, individual atomic positions can be distinguished by their clear chemical signals, resulting in high-contrast atomic columns that are easily discernible from neighboring ones, even in mixtures or pure configurations. Furthermore, EDS signals make it feasible to detect light elements, which have historically been challenging to observe at such resolutions.
These robust, high-quality outcomes are achievable thanks to the multi-SSD design of the Dual-X/Super-X and Ultra-X Detection Systems. Improved signal generation and detection have eliminated barriers associated with low probe currents required for atomic-scale spatial resolution in X-ray spectrum collection and analysis.
Atomic chemical mapping of Y2Ti2O7 in the [110] projection obtained with ChemiSTEM Technology and a probe Cs-corrector at 200 kV acceleration voltage. The maps have a size of 64 x 64 pixels with a mapping time of 306 s. A probe current of 76 pA was used. EDS maps of filtered data using 3-pixel averaging are shown. A model of the structure in [110] projection indicates that three different occupancies are present; pure yttrium, pure titanium, and 50:50 mixed Y/Ti columns.
3D EDS tomography
Modern materials research is increasingly reliant on nanoscale analysis in three dimensions. 3D characterization, including compositional data for full chemical and structural context, is possible with 3D EM and energy dispersive X-ray spectroscopy.
The ability to perform compositional analysis, and visualize the resulting chemical maps in 3D, is essential to obtain the true elemental distribution or composition of a material, ultimately delivering new insights into the structure-function relationship of the sample.
Full 3D characterization includes chemical as well as imaging data, making 3D energy dispersive X-ray spectroscopy (EDS, also abbreviated EDX or XEDS) an indispensable technique. For the highest quality results, instrumentation with dynamic high-resolution imaging capabilities, as well as fast and quantitative data acquisition, is therefore required. The combination of flexibility in acquisition schemes (TEM, STEM, and EDS), the ability to easily and reproducibly optimize the experiment, and the fast and highly sensitive collection of the elemental distribution data are prerequisites for capturing the real 3D structure and composition of nanomaterials.
Electron tomography produces 3D reconstructions of materials by incrementally adjusting the angle at which the sample is observed. This produces a tilt series of images that can be digitally back projected to render the original sample volume. EDS spectra can be obtained alongside the electron microscopy (EM) images, providing detailed elemental context. Below are just a few examples of EDS tomography use cases, covering a wide variety of scales, resolutions, and applications.
Thermo Scientific instruments offer a range of automation capabilities, allowing you to predetermine mapping conditions, drift compensation, and detector parameters, as well as autofocus and auto tilt conditions. This level of automation enables you to set up the EDS tomography experiment and then leave the system unattended for the complete data acquisition process. Visualization and reconstruction are then performed with Thermo Scientific Inspect 3D and Avizo Software.
For Research Use Only. Not for use in diagnostic procedures.